Assignee
BENVEGNU DOMINIC J
US·8 granted patents·1 pending application·100 citations·filing 2008–2012
Top patents by PatentIndex Score
9 records- 0196US9308618B2Linear prediction for filtering of data during in-situ monitoring of polishingBENVEGNU DOMINIC J·Filed 2012·Granted Apr 12, 2016·19 cites·20 claims
- 0296US8475228B2Polishing pad with partially recessed windowBENVEGNU DOMINIC J·Filed 2011·Granted Jul 2, 2013·16 cites·17 claims
- 0394US8563335B1Method of controlling polishing using in-situ optical monitoring and fourier transformBENVEGNU DOMINIC J·Filed 2012·Granted Oct 22, 2013·16 cites·17 claims
- 0494US8562389B2Thin polishing pad with window and molding processBENVEGNU DOMINIC J·Filed 2008·Granted Oct 22, 2013·20 cites·22 claims
- 0591US8125654B2Methods and apparatus for measuring substrate edge thickness during polishingBENVEGNU DOMINIC J·Filed 2009·Granted Feb 28, 2012·19 cites·16 claims
- 0690US8657646B2Endpoint detection using spectrum feature trajectoriesBENVEGNU DOMINIC J·Filed 2011·Granted Feb 25, 2014·8 cites·22 claims
- 0776US8518827B2Spectrum based endpointing for chemical mechanical polishingBENVEGNU DOMINIC J·Filed 2010·Granted Aug 27, 2013·1 cites·8 claims
- 0869US8591698B2Peak-based endpointing for chemical mechanical polishingBENVEGNU DOMINIC J·Filed 2011·Granted Nov 26, 2013·1 cites·13 claims
- 0957US2011209412A1Method of making polishing pad assembly with glass or crystalline windowBENVEGNU DOMINIC J·Filed 2011·Application pending·0 cites
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