Assignee

BENZEL TIMO

DE·1 granted patent·1 pending application·2 citations·filing 2013–2014

Technology mixG01L2 H01L2 H10W2 B81B1 B81C1

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2 records

0164US9885626B2Micromechanical sensor system and corresponding manufacturing methodBENZEL TIMO·Filed 2014·Granted Feb 6, 2018·2 cites·17 claims
0233US2014151885A1Semiconductor device and method for manufacturing a semiconductor deviceBENZEL TIMO·Filed 2013·Application pending·0 cites

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