Assignee
BERA KALLOL
US·5 granted patents·4 pending applications·801 citations·filing 2004–2012
Top patents by PatentIndex Score
9 records- 0198US8512509B2Plasma reactor gas distribution plate with radially distributed path splitting manifoldBERA KALLOL·Filed 2007·Granted Aug 20, 2013·217 cites·14 claims
- 0298US8231799B2Plasma reactor apparatus with multiple gas injection zones having time-changing separate configurable gas compositions for each zoneBERA KALLOL·Filed 2006·Granted Jul 31, 2012·557 cites·18 claims
- 0387US9267742B2Apparatus for controlling the temperature uniformity of a substrateBERA KALLOL·Filed 2010·Granted Feb 23, 2016·5 cites·19 claims
- 0479US8236105B2Apparatus for controlling gas flow in a semiconductor substrate processing chamberBERA KALLOL·Filed 2004·Granted Aug 7, 2012·22 cites·27 claims
- 0551US2009159002A1Gas distribution plate with annular plenum having a sloped ceiling for uniform distributionBERA KALLOL·Filed 2007·Application pending·0 cites
- 0651US2009230089A1Electrical control of plasma uniformity using external circuitBERA KALLOL·Filed 2008·Application pending·0 cites
- 0744US8894805B2Electron beam plasma source with profiled magnet shield for uniform plasma generationBERA KALLOL·Filed 2012·Granted Nov 25, 2014·0 cites·19 claims
- 0843US2013098553A1Electron beam plasma source with profiled chamber wall for uniform plasma generationBERA KALLOL·Filed 2012·Application pending·0 cites
- 0943US2013098555A1Electron beam plasma source with profiled conductive fins for uniform plasma generationBERA KALLOL·Filed 2012·Application pending·0 cites
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