Assignee
BERKENS MARTINUS MARIA
NL·2 granted patents·21 citations·filing 2007–2010
Top patents by PatentIndex Score
2 records- 0175US8151234B2Method for optimizing an integrated circuit physical layoutBERKENS MARTINUS MARIA·Filed 2007·Granted Apr 3, 2012·18 cites·18 claims
- 0274US8621401B2Method of selecting a set of illumination conditions of a lithographic apparatus for optimizing an integrated circuit physical layoutBERKENS MARTINUS MARIA·Filed 2010·Granted Dec 31, 2013·3 cites·11 claims
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