Assignee
BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO
DE·14 granted patents·1 pending application·18 citations·filing 2014–2021
Top patents by PatentIndex Score
15 records- 0184US9673079B2Clamp with electrode carrier diskBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2015·Granted Jun 6, 2017·7 cites·13 claims
- 0275US9673737B2Clamp with ceramic electrodeBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2015·Granted Jun 6, 2017·3 cites·11 claims
- 0372US10475689B2Method for processing a holding plate, in particular for a clamp for holding a waferBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2018·Granted Nov 12, 2019·2 cites·12 claims
- 0471US11398398B2Electrostatic holding apparatus and method for its productionBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2019·Granted Jul 26, 2022·2 cites·17 claims
- 0565US9791662B2Lightweight carrier structure, particularly for optical components, and method for its productionBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2014·Granted Oct 17, 2017·3 cites·16 claims
- 0659US2021252664A1Method and polishing apparatus for machining a plate-shaped component, and plate-shaped component, in particular electrostatic holding apparatus or immersion wafer panelBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2021·Application pending·0 cites
- 0754US11400541B2Method for production of a component by atomic diffusion bondingBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2021·Granted Aug 2, 2022·0 cites·14 claims
- 0852US9507062B2Solid body joining of a carrier body and a cover layer, particularly by anodic bondingBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2014·Granted Nov 29, 2016·0 cites·11 claims
- 0948US9442006B2Method and apparatus for measuring the shape of a wave-front of an optical radiation fieldBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2015·Granted Sep 13, 2016·1 cites·11 claims
- 1040US9728438B2Method for producing an electrostatic holding apparatusBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2015·Granted Aug 8, 2017·0 cites·16 claims
- 1139US10256130B2Electrostatic holding device and method for the operation thereof, and charge transfer circuitBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2016·Granted Apr 9, 2019·0 cites·15 claims
- 1237US11201075B2Holding apparatus for electrostatically holding a component, including a base body joined by diffusion bonding, and process for its manufactureBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2020·Granted Dec 14, 2021·0 cites·20 claims
- 1334US9537430B2Clamp with burls-electrodeBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2015·Granted Jan 3, 2017·0 cites·11 claims
- 1433US10388551B2Detection circuit, electrostatic holding device and method for detecting a component on an electrostatic holding deviceBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2017·Granted Aug 20, 2019·0 cites·17 claims
- 1532US10987760B2Method of manufacturing a holding plate, in particular for a clamp for holding wafersBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2016·Granted Apr 27, 2021·0 cites·17 claims
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