Assignee
BERTRAM JR RONALD THOMAS
US·3 granted patents·5 pending applications·5 citations·filing 2009–2012
Top patents by PatentIndex Score
8 records- 0178US8431419B2UV absorption based monitor and control of chloride gas streamBERTRAM JR RONALD THOMAS·Filed 2009·Granted Apr 30, 2013·3 cites·15 claims
- 0268US8486192B2Thermalizing gas injectors for generating increased precursor gas, material deposition systems including such injectors, and related methodsBERTRAM JR RONALD THOMAS·Filed 2010·Granted Jul 16, 2013·2 cites·26 claims
- 0349US2013160802A1Processes and systems for reducing undesired deposits within a reaction chamber associated with a semiconductor deposition systemBERTRAM JR RONALD THOMAS·Filed 2012·Application pending·0 cites
- 0448US9644285B2Direct liquid injection for halide vapor phase epitaxy systems and methodsBERTRAM JR RONALD THOMAS·Filed 2012·Granted May 9, 2017·0 cites·22 claims
- 0547US2013052806A1Deposition systems having access gates at desirable locations, and related methodsBERTRAM JR RONALD THOMAS·Filed 2012·Application pending·0 cites
- 0647US2013047918A1Deposition systems including a precursor gas furnace within a reaction chamber, and related methodsBERTRAM JR RONALD THOMAS·Filed 2012·Application pending·0 cites
- 0746US2011033610A1Modular and readily configurable reactor enclosures and associated function modulesBERTRAM JR RONALD THOMAS·Filed 2009·Application pending·0 cites
- 0844US2011305835A1Systems and methods for a gas treatment of a number of substratesBERTRAM JR RONALD THOMAS·Filed 2010·Application pending·0 cites
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