Assignee
BINNARD MICHAEL B
US·4 granted patents·5 pending applications·13 citations·filing 2005–2012
Top patents by PatentIndex Score
9 records- 0181US9030057B2Method and apparatus to allow a plurality of stages to operate in close proximityBINNARD MICHAEL B·Filed 2012·Granted May 12, 2015·7 cites·12 claims
- 0268US8212435B2High efficiency voice coil motorBINNARD MICHAEL B·Filed 2008·Granted Jul 3, 2012·4 cites·27 claims
- 0362US8492934B2Coil variations for an oval coil planar motorBINNARD MICHAEL B·Filed 2010·Granted Jul 23, 2013·1 cites·33 claims
- 0455US8853988B2Control systems and methods for compensating for effects of a stage motorBINNARD MICHAEL B·Filed 2009·Granted Oct 7, 2014·1 cites·10 claims
- 0548US2010090545A1Planar motor with wedge shaped magnets and diagonal magnetization directionsBINNARD MICHAEL B·Filed 2009·Application pending·0 cites
- 0643US2013164687A1Hybrid cooling and thermal shield for electromagnetic actuatorsBINNARD MICHAEL B·Filed 2012·Application pending·0 cites
- 0741US2013033122A1Method and apparatus for driving a stage using angled actuators for pushpoint matchingBINNARD MICHAEL B·Filed 2012·Application pending·0 cites
- 0841US2008105069A1Fine Stage Z Support ApparatusBINNARD MICHAEL B·Filed 2005·Application pending·0 cites
- 0939US2012062866A1Microchannel-cooled coils of electromagnetic actuators exhibiting reduced eddy-current dragBINNARD MICHAEL B·Filed 2011·Application pending·0 cites
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