Assignee
BLUESHIFT TECHNOLOGIES INC
US·3 granted patents·199 citations·filing 2004–2004
Top patents by PatentIndex Score
3 records- 0196US7422406B2Stacked process modules for a semiconductor handling systemBLUESHIFT TECHNOLOGIES INC·Filed 2004·Granted Sep 9, 2008·70 cites·22 claims
- 0294US7458763B2Mid-entry load lock for semiconductor handling systemBLUESHIFT TECHNOLOGIES INC·Filed 2004·Granted Dec 2, 2008·77 cites·22 claims
- 0394US7210246B2Methods and systems for handling a workpiece in vacuum-based material handling systemBLUESHIFT TECHNOLOGIES INC·Filed 2004·Granted May 1, 2007·52 cites·34 claims
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