Assignee
BOXER CROSS INC
US·14 granted patents·840 citations·filing 1996–2002
Top patents by PatentIndex Score
14 records- 0195US6049220AApparatus and method for evaluating a wafer of semiconductor materialBOXER CROSS INC·Filed 1998·Granted Apr 11, 2000·151 cites·63 claims
- 0294US6483594B2Apparatus and method for determining the active dopant profile in a semiconductor waferBOXER CROSS INC·Filed 2001·Granted Nov 19, 2002·51 cites·29 claims
- 0394US6426644B1Apparatus and method for determining the active dopant profile in a semiconductor waferBOXER CROSS INC·Filed 2001·Granted Jul 30, 2002·47 cites·10 claims
- 0493US6323951B1Apparatus and method for determining the active dopant profile in a semiconductor waferBOXER CROSS INC·Filed 1999·Granted Nov 27, 2001·93 cites·26 claims
- 0590US6054868AApparatus and method for measuring a property of a layer in a multilayered structureBOXER CROSS INC·Filed 1998·Granted Apr 25, 2000·94 cites·27 claims
- 0690US5877860ASystem and method for measuring the microroughness of a surface of a substrateBOXER CROSS INC·Filed 1996·Granted Mar 2, 1999·70 cites·40 claims
- 0789US6971791B2Identifying defects in a conductive structure of a wafer, based on heat transfer therethroughBOXER CROSS INC·Filed 2002·Granted Dec 6, 2005·46 cites·38 claims
- 0889US6812047B1Evaluating a geometric or material property of a multilayered structureBOXER CROSS INC·Filed 2000·Granted Nov 2, 2004·41 cites·68 claims
- 0989US6154280ASystem and method for measuring the microroughness of a surface of a substrateBOXER CROSS INC·Filed 1998·Granted Nov 28, 2000·64 cites·50 claims
- 1086US5966019ASystem and method for measuring properties of a semiconductor substrate in a fabrication lineBOXER CROSS INC·Filed 1996·Granted Oct 12, 1999·81 cites·41 claims
- 1181US5883518ASystem and method for measuring the doping level and doping profile of a region in a semiconductor substrateBOXER CROSS INC·Filed 1996·Granted Mar 16, 1999·61 cites·43 claims
- 1278US6885444B2Evaluating a multi-layered structure for voidsBOXER CROSS INC·Filed 2002·Granted Apr 26, 2005·14 cites·39 claims
- 1376US6911349B2Evaluating sidewall coverage in a semiconductor waferBOXER CROSS INC·Filed 2001·Granted Jun 28, 2005·16 cites·39 claims
- 1466US6812717B2Use of a coefficient of a power curve to evaluate a semiconductor waferBOXER CROSS INC·Filed 2001·Granted Nov 2, 2004·11 cites·34 claims
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