Assignee
BRISTOL ROBERT L
US·3 granted patents·3 pending applications·90 citations·filing 2006–2015
Top patents by PatentIndex Score
6 records- 0197US9041217B1Self-aligned via patterning with multi-colored photobuckets for back end of line (BEOL) interconnectsBRISTOL ROBERT L·Filed 2013·Granted May 26, 2015·53 cites·5 claims
- 0295US9406512B2Self-aligned via patterning with multi-colored photobuckets for back end of line (BEOL) interconnectsBRISTOL ROBERT L·Filed 2015·Granted Aug 2, 2016·16 cites·16 claims
- 0394US9236342B2Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnectsBRISTOL ROBERT L·Filed 2013·Granted Jan 12, 2016·21 cites·20 claims
- 0444US2008160256A1Reduction of line edge roughness by chemical mechanical polishingBRISTOL ROBERT L·Filed 2006·Application pending·0 cites
- 0542US2007231713A1Anti-reflective coating for out-of-band illumination with lithography optical systemsBRISTOL ROBERT L·Filed 2006·Application pending·0 cites
- 0642US2007231751A1Photoresist top coat out-of-band illumination filter for photolithographyBRISTOL ROBERT L·Filed 2006·Application pending·0 cites
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