Assignee

BRODMANN TECH GMBH

DE·1 granted patent·5 citations·filing 2016–2016

Technology mixB23Q1 G01B1 G01N1

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0174US10180316B2Method and device for the contactless assessment of the surface quality of a waferBRODMANN TECH GMBH·Filed 2016·Granted Jan 15, 2019·5 cites·15 claims

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