Assignee
BROOKS AUTOMATION
US·7 granted patents·243 citations·filing 1995–2002
Top patents by PatentIndex Score
7 records- 0192US6719517B2Substrate processing apparatus with independently configurable integral load locksBROOKS AUTOMATION·Filed 2001·Granted Apr 13, 2004·63 cites·8 claims
- 0290US6364593B1Material transport systemBROOKS AUTOMATION·Filed 2000·Granted Apr 2, 2002·59 cites·17 claims
- 0381US6567711B1Observer-corrector control system for systems with unmodeled dynamicsBROOKS AUTOMATION·Filed 2000·Granted May 20, 2003·31 cites·20 claims
- 0478US5655060ATime optimal trajectory for cluster tool robotsBROOKS AUTOMATION·Filed 1995·Granted Aug 5, 1997·55 cites·13 claims
- 0552US6721801B2Increased network availability for computers using redundancyBROOKS AUTOMATION·Filed 2000·Granted Apr 13, 2004·11 cites·23 claims
- 0652US5588789ALoad arm for load lockBROOKS AUTOMATION·Filed 1995·Granted Dec 31, 1996·18 cites·21 claims
- 0742US7185325B2Application class extensionsBROOKS AUTOMATION·Filed 2002·Granted Feb 27, 2007·6 cites·20 claims
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