Assignee
BROOKS PRI AUTOMATION INC
US·2 granted patents·54 citations·filing 2002–2002
Top patents by PatentIndex Score
2 records- 0181US6813543B2Substrate handling system for aligning and orienting substrates during a transfer operationBROOKS PRI AUTOMATION INC·Filed 2002·Granted Nov 2, 2004·54 cites·63 claims
- 0225US6827546B2Modular frame for a wafer fabrication systemBROOKS PRI AUTOMATION INC·Filed 2002·Granted Dec 7, 2004·0 cites·14 claims
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