Assignee
BROWN IAN J
US·4 granted patents·1 pending application·10 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0181US8083862B2Method and system for monitoring contamination on a substrateBROWN IAN J·Filed 2007·Granted Dec 27, 2011·8 cites·16 claims
- 0269US9257292B2Etch system and method for single substrate processingBROWN IAN J·Filed 2011·Granted Feb 9, 2016·2 cites·30 claims
- 0339US8940103B2Sequential stage mixing for single substrate strip processingBROWN IAN J·Filed 2012·Granted Jan 27, 2015·0 cites·13 claims
- 0438US9075318B2Sequential stage mixing for a resist batch strip processBROWN IAN J·Filed 2012·Granted Jul 7, 2015·0 cites·25 claims
- 0536US2012248061A1Increasing masking layer etch rate and selectivityBROWN IAN J·Filed 2011·Application pending·0 cites
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