Assignee
BRUGGER MICHAEL
AT·5 granted patents·1 pending application·29 citations·filing 2007–2022
Top patents by PatentIndex Score
6 records- 0186US9190310B2Grounded chuckBRUGGER MICHAEL·Filed 2010·Granted Nov 17, 2015·10 cites·17 claims
- 0284US8608146B2Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pinBRUGGER MICHAEL·Filed 2009·Granted Dec 17, 2013·14 cites·15 claims
- 0370US8231939B2Device and method for wet treating plate-like-articlesBRUGGER MICHAEL·Filed 2007·Granted Jul 31, 2012·4 cites·16 claims
- 0459US8936832B2Device and method for wet treating plate-like-articlesBRUGGER MICHAEL·Filed 2011·Granted Jan 20, 2015·1 cites·18 claims
- 0551US2024290649A1Device for holding a wafer-shaped articleBRUGGER MICHAEL·Filed 2022·Application pending·0 cites
- 0648US8613288B2High temperature chuck and method of using sameBRUGGER MICHAEL·Filed 2009·Granted Dec 24, 2013·0 cites·10 claims
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