Assignee
BRUKER TECH LTD
IL·10 granted patents·3 pending applications·11 citations·filing 2019–2025
Top patents by PatentIndex Score
13 records- 0192US11181490B2Small-angle x-ray scatterometryBRUKER TECH LTD·Filed 2019·Granted Nov 23, 2021·10 cites·25 claims
- 0288US11781999B2Spot-size control in reflection-based and scatterometry-based X-ray metrology systemsBRUKER TECH LTD·Filed 2022·Granted Oct 10, 2023·1 cites·20 claims
- 0378US12085521B2Small-angle X-ray scatterometryBRUKER TECH LTD·Filed 2023·Granted Sep 10, 2024·0 cites·16 claims
- 0477US2024377342A1Small-Angle X-Ray ScatterometryBRUKER TECH LTD·Filed 2024·Application pending·0 cites
- 0573US12249059B2Navigation accuracy using camera coupled with detector assemblyBRUKER TECH LTD·Filed 2022·Granted Mar 11, 2025·0 cites·23 claims
- 0671US11703464B2Small-angle x-ray scatterometryBRUKER TECH LTD·Filed 2021·Granted Jul 18, 2023·0 cites·19 claims
- 0766US2025157023A1Navigation accuracy using imaging assembly coupled with detector assembliesBRUKER TECH LTD·Filed 2025·Application pending·0 cites
- 0865US12078604B2Monitoring properties of X-ray beam during X-ray analysisBRUKER TECH LTD·Filed 2022·Granted Sep 3, 2024·0 cites·20 claims
- 0963US2025354943A1Analysis of Low-energy X-ray Fluorescence Emitted from Sample in Atmospheric EnvironmentBRUKER TECH LTD·Filed 2025·Application pending·0 cites
- 1062US12339239B2X-ray diffraction imaging detector having multiple angled input facesBRUKER TECH LTD·Filed 2023·Granted Jun 24, 2025·0 cites·18 claims
- 1160US12535438B2Analysis of x-ray scatterometry data using deep learningBRUKER TECH LTD·Filed 2023·Granted Jan 27, 2026·0 cites·20 claims
- 1258US11761913B2Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt of stacks of high-aspect-ratio (HAR) structuresBRUKER TECH LTD·Filed 2021·Granted Sep 19, 2023·0 cites·18 claims
- 1354US11302508B2X-ray tubeBRUKER TECH LTD·Filed 2019·Granted Apr 12, 2022·0 cites·18 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →