Assignee
BRUNNER TIMOTHY A
US·6 granted patents·16 citations·filing 2006–2012
Top patents by PatentIndex Score
6 records- 0184US8239789B2System and method of predicting problematic areas for lithography in a circuit designBRUNNER TIMOTHY A·Filed 2011·Granted Aug 7, 2012·3 cites·8 claims
- 0282US8582078B2Test method for determining reticle transmission stabilityBRUNNER TIMOTHY A·Filed 2011·Granted Nov 12, 2013·4 cites·17 claims
- 0378US8238644B2Fast method to model photoresist images using focus blur and resist blurBRUNNER TIMOTHY A·Filed 2006·Granted Aug 7, 2012·5 cites·22 claims
- 0474US8484586B2System and method of predicting problematic areas for lithography in a circuit designBRUNNER TIMOTHY A·Filed 2012·Granted Jul 9, 2013·1 cites·20 claims
- 0569US8119322B2Method for producing self-aligned mask, articles produced by same and composition for sameBRUNNER TIMOTHY A·Filed 2008·Granted Feb 21, 2012·3 cites·17 claims
- 0644US9411223B2On-product focus offset metrology for use in semiconductor chip manufacturingBRUNNER TIMOTHY A·Filed 2012·Granted Aug 9, 2016·0 cites·22 claims
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