Assignee
BRUSIC VLASTA
US·3 granted patents·52 citations·filing 2005–2008
Top patents by PatentIndex Score
3 records- 0194US9343330B2Compositions for polishing aluminum/copper and titanium in damascene structuresBRUSIC VLASTA·Filed 2006·Granted May 17, 2016·41 cites·4 claims
- 0282US8062096B2Use of CMP for aluminum mirror and solar cell fabricationBRUSIC VLASTA·Filed 2005·Granted Nov 22, 2011·10 cites·42 claims
- 0362US8425797B2Compositions for polishing aluminum/copper and titanium in damascene structuresBRUSIC VLASTA·Filed 2008·Granted Apr 23, 2013·1 cites·8 claims
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