Assignee
BURKHARDT MARTIN
US·2 granted patents·3 citations·filing 2010–2012
Top patents by PatentIndex Score
2 records- 0174US9058997B2Process of multiple exposures with spin castable filmsBURKHARDT MARTIN·Filed 2012·Granted Jun 16, 2015·3 cites·19 claims
- 0246US8507346B2Method of forming a semiconductor device having a cut-way hole to expose a portion of a hardmask layerBURKHARDT MARTIN·Filed 2010·Granted Aug 13, 2013·0 cites·4 claims
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