Assignee
BURNHAM JAY S
US·3 granted patents·0 citations·filing 2007–2012
Top patents by PatentIndex Score
3 records- 0153US8758962B2Method and apparatus for sub-pellicle defect reduction on photomasksBURNHAM JAY S·Filed 2012·Granted Jun 24, 2014·0 cites·16 claims
- 0249US8709887B2Method for fabricating a nitrided silicon-oxide gate dielectricBURNHAM JAY S·Filed 2007·Granted Apr 29, 2014·0 cites·18 claims
- 0349US8173331B2Method and apparatus for sub-pellicle defect reduction on photomasksBURNHAM JAY S·Filed 2010·Granted May 8, 2012·0 cites·20 claims
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