Assignee
BURROWS BRIAN H
US·1 granted patent·6 pending applications·14 citations·filing 2007–2011
Top patents by PatentIndex Score
7 records- 0187US8481118B2Multi-gas straight channel showerheadBURROWS BRIAN H·Filed 2011·Granted Jul 9, 2013·14 cites·9 claims
- 0252US2010215854A1Hvpe showerhead designBURROWS BRIAN H·Filed 2010·Application pending·0 cites
- 0350US2008289575A1Methods and apparatus for depositing a group iii-v film using a hydride vapor phase epitaxy processBURROWS BRIAN H·Filed 2007·Application pending·0 cites
- 0450US2008314317A1Showerhead design with precursor pre-mixingBURROWS BRIAN H·Filed 2007·Application pending·0 cites
- 0550US2008276860A1Cross flow apparatus and method for hydride vapor phase depositionBURROWS BRIAN H·Filed 2007·Application pending·0 cites
- 0647US2008314311A1Hvpe showerhead designBURROWS BRIAN H·Filed 2007·Application pending·0 cites
- 0742US2009194026A1Processing system for fabricating compound nitride semiconductor devicesBURROWS BRIAN H·Filed 2008·Application pending·0 cites
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