Assignee
BYUN CHUL SOO
KR·2 granted patents·76 citations·filing 2007–2009
Top patents by PatentIndex Score
2 records- 0193US8882913B2Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereofBYUN CHUL SOO·Filed 2007·Granted Nov 11, 2014·48 cites·8 claims
- 0293US8298370B2Apparatus for chemical vapor deposition (CVD) with showerheadBYUN CHUL SOO·Filed 2009·Granted Oct 30, 2012·28 cites·10 claims
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