Assignee
C I SYSTEMS ISRAEL LTD
IL·2 granted patents·80 citations·filing 1993–1995
Top patents by PatentIndex Score
2 records- 0177US5823681AMultipoint temperature monitoring apparatus for semiconductor wafers during processingC I SYSTEMS ISRAEL LTD·Filed 1995·Granted Oct 20, 1998·54 cites·21 claims
- 0263US5322361AMethod and apparatus for measuring temperatureC I SYSTEMS ISRAEL LTD·Filed 1993·Granted Jun 21, 1994·26 cites·20 claims
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