Assignee
CAMBRIDGE INSTR LTD
GB·6 granted patents·152 citations·filing 1981–1984
Top patents by PatentIndex Score
6 records- 0187US4587617AImage inspection system for defect detectionCAMBRIDGE INSTR LTD·Filed 1983·Granted May 6, 1986·59 cites·13 claims
- 0286US4446817AApparatus for vapor deposition of a film on a substrateCAMBRIDGE INSTR LTD·Filed 1981·Granted May 8, 1984·53 cites·19 claims
- 0375US4514634AElectron beam focussingCAMBRIDGE INSTR LTD·Filed 1983·Granted Apr 30, 1985·18 cites·18 claims
- 0462US4604523AScannable-beam microscopes and image stores thereforCAMBRIDGE INSTR LTD·Filed 1984·Granted Aug 5, 1986·11 cites·10 claims
- 0535US4578765AImage comparison systemsCAMBRIDGE INSTR LTD·Filed 1983·Granted Mar 25, 1986·10 cites·7 claims
- 0623US4614872ACharged particle deflectionCAMBRIDGE INSTR LTD·Filed 1984·Granted Sep 30, 1986·1 cites·2 claims
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