Assignee
CARL ZEISS MICROELECTRIC SYSTE
DE·2 granted patents·30 citations·filing 2002–2003
Top patents by PatentIndex Score
2 records- 0176US6925225B2Device for flat illumination of an object fieldCARL ZEISS MICROELECTRIC SYSTE·Filed 2002·Granted Aug 2, 2005·24 cites·3 claims
- 0257US6894837B2Imaging system for an extreme ultraviolet (EUV) beam-based microscopeCARL ZEISS MICROELECTRIC SYSTE·Filed 2003·Granted May 17, 2005·6 cites·11 claims
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