Assignee

CASCASE MICROTECH INC

US·1 granted patent·4 citations·filing 2003–2003

Technology mixA46D1 G01R1 H10P1

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0161US6980012B2Wafer probe station for low-current measurementsCASCASE MICROTECH INC·Filed 2003·Granted Dec 27, 2005·4 cites·8 claims

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