Assignee
CELERITY INC
US·37 granted patents·3 pending applications·917 citations·filing 2001–2007
Top patents by PatentIndex Score
40 records- 0196US7380564B2System and method for a mass flow controllerCELERITY INC·Filed 2007·Granted Jun 3, 2008·34 cites·36 claims
- 0296US7360448B2Ultrasonic flow sensor having reflecting interfaceCELERITY INC·Filed 2006·Granted Apr 22, 2008·57 cites·57 claims
- 0396US7273063B2Methods and apparatus for pressure compensation in a mass flow controllerCELERITY INC·Filed 2005·Granted Sep 25, 2007·36 cites·36 claims
- 0495US7434477B2Methods and apparatus for pressure compensation in a mass flow controllerCELERITY INC·Filed 2007·Granted Oct 14, 2008·29 cites·31 claims
- 0595US7272512B2Flow sensor signal conversionCELERITY INC·Filed 2005·Granted Sep 18, 2007·30 cites·35 claims
- 0694US7231931B2System and method for a mass flow controllerCELERITY INC·Filed 2005·Granted Jun 19, 2007·25 cites·43 claims
- 0794US7225835B2Modular substrate gas panel having manifold connections in a common planeCELERITY INC·Filed 2005·Granted Jun 5, 2007·23 cites·16 claims
- 0894US7073392B2Methods and apparatus for pressure compensation in a mass flow controllerCELERITY INC·Filed 2003·Granted Jul 11, 2006·93 cites·31 claims
- 0992US7360551B2Method and apparatus for providing a determined ratio of process fluidsCELERITY INC·Filed 2007·Granted Apr 22, 2008·27 cites·20 claims
- 1091US6923568B2Method and apparatus for blending process materialsCELERITY INC·Filed 2001·Granted Aug 2, 2005·98 cites·9 claims
- 1188US7143774B2Method and apparatus for providing a determined ratio of process fluidsCELERITY INC·Filed 2005·Granted Dec 5, 2006·18 cites·20 claims
- 1287US7424894B2Method and apparatus for providing a determined ratio of process fluidsCELERITY INC·Filed 2006·Granted Sep 16, 2008·17 cites·6 claims
- 1387US7334605B2Modular substrate gas panel having manifold connections in a common planeCELERITY INC·Filed 2003·Granted Feb 26, 2008·33 cites·41 claims
- 1485US7117104B2Ultrasonic liquid flow controllerCELERITY INC·Filed 2004·Granted Oct 3, 2006·42 cites·30 claims
- 1584US7307247B2Surface mount heaterCELERITY INC·Filed 2006·Granted Dec 11, 2007·18 cites·11 claims
- 1683US7216019B2Method and system for a mass flow controller with reduced pressure sensitivityCELERITY INC·Filed 2004·Granted May 8, 2007·49 cites·44 claims
- 1780US7412986B2Method and system for flow measurement and validation of a mass flow controllerCELERITY INC·Filed 2004·Granted Aug 19, 2008·25 cites·23 claims
- 1880US7409871B2Mass flow meter or controller with inclination sensorCELERITY INC·Filed 2006·Granted Aug 12, 2008·16 cites·38 claims
- 1980US7043374B2Flow sensor signal conversionCELERITY INC·Filed 2003·Granted May 9, 2006·19 cites·46 claims
- 2080US6941965B2Method and apparatus for providing a determined ratio of process fluidsCELERITY INC·Filed 2004·Granted Sep 13, 2005·23 cites·17 claims
- 2179US7126094B2Surface mount heaterCELERITY INC·Filed 2004·Granted Oct 24, 2006·28 cites·40 claims
- 2276US7490518B2System and method of operation of an embedded system for a digital capacitance diaphragm gaugeCELERITY INC·Filed 2006·Granted Feb 17, 2009·6 cites·20 claims
- 2375US7344298B2Method and apparatus for blending process materialsCELERITY INC·Filed 2003·Granted Mar 18, 2008·34 cites·23 claims
- 2475US7133785B2Valve control system and methodCELERITY INC·Filed 2004·Granted Nov 7, 2006·31 cites·30 claims
- 2572US7131334B2Pressure sensor device and methodCELERITY INC·Filed 2004·Granted Nov 7, 2006·18 cites·18 claims
- 2671US7424895B2Method and system for flow measurement and validation of a mass flow controllerCELERITY INC·Filed 2004·Granted Sep 16, 2008·16 cites·25 claims
- 2768US7287434B2System and method for measuring flowCELERITY INC·Filed 2006·Granted Oct 30, 2007·7 cites·35 claims
- 2864US7363182B2System and method for mass flow detection device calibrationCELERITY INC·Filed 2005·Granted Apr 22, 2008·5 cites·10 claims
- 2963US7395716B2Variable capacitance measuring deviceCELERITY INC·Filed 2006·Granted Jul 8, 2008·4 cites·13 claims
- 3063US7243035B2System and method for mass flow detection device calibrationCELERITY INC·Filed 2003·Granted Jul 10, 2007·9 cites·10 claims
- 3163US7150201B2System and method for measuring flowCELERITY INC·Filed 2004·Granted Dec 19, 2006·14 cites·35 claims
- 3259US7222029B2Attitude insensitive flow device system and methodCELERITY INC·Filed 2004·Granted May 22, 2007·10 cites·37 claims
- 3357US7073388B2Variable capacitance measuring device comprising a glass-ceramic insulatorCELERITY INC·Filed 2004·Granted Jul 11, 2006·7 cites·19 claims
- 3455US7412336B2Attitude insensitive flow device system and methodCELERITY INC·Filed 2007·Granted Aug 12, 2008·3 cites·20 claims
- 3554US7113895B2System and method for filtering output in mass flow controllers and mass flow metersCELERITY INC·Filed 2004·Granted Sep 26, 2006·6 cites·6 claims
- 3654US2008062813A1Method and apparatus for blending process materialsCELERITY INC·Filed 2007·Application pending·0 cites
- 3753US7082824B2Variable resistance sensor with common reference legCELERITY INC·Filed 2004·Granted Aug 1, 2006·5 cites·21 claims
- 3848US2008041843A1Surface mount heaterCELERITY INC·Filed 2007·Application pending·0 cites
- 3940US7124647B2Slotted flow restrictor for a mass flow meterCELERITY INC·Filed 2003·Granted Oct 24, 2006·2 cites·26 claims
- 4040US2008097657A1Method and System for Wafer Temperature ControlCELERITY INC·Filed 2005·Application pending·0 cites
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