Assignee

CFM TECHNOLOGIES INC

US·2 granted patents·206 citations·filing 1987–1988

Technology mixB05C2 B08B2 H10P2 Y10S2 C23C1 C30B1

Top patents by PatentIndex Score

2 records

0194US4899767AMethod and system for fluid treatment of semiconductor wafersCFM TECHNOLOGIES INC·Filed 1988·Granted Feb 13, 1990·137 cites·19 claims
0284US4856544AVessel and system for treating wafers with fluidsCFM TECHNOLOGIES INC·Filed 1987·Granted Aug 15, 1989·69 cites·5 claims

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