Assignee
CHANG YU
US·3 granted patents·22 citations·filing 2007–2012
Top patents by PatentIndex Score
3 records- 0188US8618446B2Substrate support with substrate heater and symmetric RF returnCHANG YU·Filed 2011·Granted Dec 31, 2013·12 cites·22 claims
- 0284US8721847B2Homing of arbitrary scan path of a rotating magnetronCHANG YU·Filed 2012·Granted May 13, 2014·4 cites·10 claims
- 0381US8114256B2Control of arbitrary scan path of a rotating magnetronCHANG YU·Filed 2007·Granted Feb 14, 2012·6 cites·17 claims
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