Assignee
CHARM ENGINEERING CO LTD
KR·1 granted patent·9 pending applications·16 citations·filing 2009–2016
Top patents by PatentIndex Score
10 records- 0181US8373086B2Plasma processing apparatus and method for plasma processingCHARM ENGINEERING CO LTD·Filed 2009·Granted Feb 12, 2013·16 cites·20 claims
- 0257US2016160351A1Liner assembly and substrate processing apparatus having the sameCHARM ENGINEERING CO LTD·Filed 2016·Application pending·0 cites
- 0350US2014283746A1Liner assembly and substrate processing apparatus having the sameCHARM ENGINEERING CO LTD·Filed 2013·Application pending·0 cites
- 0448US2016168706A1Liner assembly and substrate processing apparatus having the sameCHARM ENGINEERING CO LTD·Filed 2016·Application pending·0 cites
- 0547US2011049100A1Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the sameCHARM ENGINEERING CO LTD·Filed 2009·Application pending·0 cites
- 0646US2014332498A1Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the sameCHARM ENGINEERING CO LTD·Filed 2014·Application pending·0 cites
- 0741US2016029950A1Method and apparatus for measuring anesthetic depth using cepstrum techniqueCHARM ENGINEERING CO LTD·Filed 2014·Application pending·0 cites
- 0841US2015374285A1Method and apparatus for measuring anesthetic depthCHARM ENGINEERING CO LTD·Filed 2014·Application pending·0 cites
- 0938US2014251540A1Substrate supporter and substrate processing apparatus including the sameCHARM ENGINEERING CO LTD·Filed 2014·Application pending·0 cites
- 1028US2015348755A1Gas distribution apparatus and substrate processing apparatus including sameCHARM ENGINEERING CO LTD·Filed 2015·Application pending·0 cites
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