Assignee
CHARTERED SEMICONDUCTOR MFG CO
SG·8 granted patents·216 citations·filing 1998–2000
Top patents by PatentIndex Score
8 records- 0186US6583069B1Method of silicon oxide and silicon glass films depositionCHARTERED SEMICONDUCTOR MFG CO·Filed 1999·Granted Jun 24, 2003·49 cites·19 claims
- 0278US6235591B1Method to form gate oxides of different thicknesses on a silicon substrateCHARTERED SEMICONDUCTOR MFG CO·Filed 1999·Granted May 22, 2001·46 cites·20 claims
- 0374US6150269ACopper interconnect patterningCHARTERED SEMICONDUCTOR MFG CO·Filed 1998·Granted Nov 21, 2000·46 cites·21 claims
- 0464US6403478B1Low pre-heat pressure CVD TiN processCHARTERED SEMICONDUCTOR MFG CO·Filed 2000·Granted Jun 11, 2002·11 cites·20 claims
- 0560US6354781B1Semiconductor manufacturing systemCHARTERED SEMICONDUCTOR MFG CO·Filed 1999·Granted Mar 12, 2002·26 cites·11 claims
- 0653US6251798B1Formation of air gap structures for inter-metal dielectric applicationCHARTERED SEMICONDUCTOR MFG CO·Filed 1999·Granted Jun 26, 2001·21 cites·29 claims
- 0741US6270307B1Method for aligning wafers in a cassetteCHARTERED SEMICONDUCTOR MFG CO·Filed 1999·Granted Aug 7, 2001·13 cites·7 claims
- 0836US6307248B1Definition of anti-fuse cell for programmable gate array applicationCHARTERED SEMICONDUCTOR MFG CO·Filed 1999·Granted Oct 23, 2001·4 cites·20 claims
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