Assignee
CHARTERED SEMICONDUCTORS MFG L
SG·4 granted patents·37 citations·filing 2001–2001
Top patents by PatentIndex Score
4 records- 0166US6528838B1Damascene MIM capacitor with a curvilinear surface structureCHARTERED SEMICONDUCTORS MFG L·Filed 2001·Granted Mar 4, 2003·11 cites·13 claims
- 0265US6645810B2Method to fabricate MIM capacitor using damascene processCHARTERED SEMICONDUCTORS MFG L·Filed 2001·Granted Nov 11, 2003·14 cites·13 claims
- 0360US7208426B2Preventing plasma induced damage resulting from high density plasma depositionCHARTERED SEMICONDUCTORS MFG L·Filed 2001·Granted Apr 24, 2007·12 cites·20 claims
- 0422US6699788B2Method for integrated nucleation and bulk film depositionCHARTERED SEMICONDUCTORS MFG L·Filed 2001·Granted Mar 2, 2004·0 cites·20 claims
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