Assignee
CHEBI ROBERT P
US·2 granted patents·1 pending application·2 citations·filing 2011–2011
Top patents by PatentIndex Score
3 records- 0158US9318341B2Methods for etching a substrateCHEBI ROBERT P·Filed 2011·Granted Apr 19, 2016·2 cites·20 claims
- 0245US8757178B2Method and apparatus for removing photoresistCHEBI ROBERT P·Filed 2011·Granted Jun 24, 2014·0 cites·14 claims
- 0328US2012152900A1Methods and apparatus for gas delivery into plasma processing chambersCHEBI ROBERT P·Filed 2011·Application pending·0 cites
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