Assignee
CHEN HAIGUANG
US·5 granted patents·14 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0180US8494802B2Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a waferCHEN HAIGUANG·Filed 2009·Granted Jul 23, 2013·8 cites·19 claims
- 0273US9031810B2Methods and systems of object based metrology for advanced wafer surface nanotopographyCHEN HAIGUANG·Filed 2011·Granted May 12, 2015·3 cites·13 claims
- 0363US8630479B2Methods and systems for improved localized feature quantification in surface metrology toolsCHEN HAIGUANG·Filed 2011·Granted Jan 14, 2014·2 cites·19 claims
- 0461US10330608B2Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology toolsCHEN HAIGUANG·Filed 2012·Granted Jun 25, 2019·1 cites·25 claims
- 0541US8594975B2Systems and methods for wafer edge feature detection and quantificationCHEN HAIGUANG·Filed 2011·Granted Nov 26, 2013·0 cites·14 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →