Assignee
CHEN HUNG-CHIH
US·10 granted patents·5 pending applications·79 citations·filing 2008–2012
Top patents by PatentIndex Score
15 records- 0196US8066551B2Retaining ring with shaped surfaceCHEN HUNG CHIH·Filed 2011·Granted Nov 29, 2011·14 cites·19 claims
- 0295US8721391B2Carrier head with narrow inner ring and wide outer ringCHEN HUNG CHIH·Filed 2011·Granted May 13, 2014·13 cites·17 claims
- 0395US8088299B2Multiple zone carrier head with flexible membraneCHEN HUNG CHIH·Filed 2010·Granted Jan 3, 2012·22 cites·13 claims
- 0494US8585468B2Retaining ring with shaped surfaceCHEN HUNG CHIH·Filed 2011·Granted Nov 19, 2013·8 cites·5 claims
- 0589US8591286B2Apparatus and method for temperature control during polishingCHEN HUNG CHIH·Filed 2010·Granted Nov 26, 2013·8 cites·20 claims
- 0680US8460067B2Polishing head zone boundary smoothingCHEN HUNG CHIH·Filed 2010·Granted Jun 11, 2013·4 cites·20 claims
- 0775US8550879B2Polishing pad conditionerCHEN HUNG CHIH·Filed 2008·Granted Oct 8, 2013·5 cites·14 claims
- 0871US8597084B2Textured platenCHEN HUNG CHIH·Filed 2009·Granted Dec 3, 2013·3 cites·19 claims
- 0965US8181302B2Brush alignment control mechanismCHEN HUNG CHIH·Filed 2009·Granted May 22, 2012·2 cites·17 claims
- 1051US9050700B2Methods and apparatus for an improved polishing head retaining ringCHEN HUNG CHIH·Filed 2012·Granted Jun 9, 2015·0 cites·20 claims
- 1146US2012239340A1Lithium cell simulating deviceCHEN HUNG-CHIH·Filed 2011·Application pending·0 cites
- 1245US2014020829A1Sensors in Carrier Head of a CMP SystemCHEN HUNG CHIH·Filed 2012·Application pending·0 cites
- 1342US2012183170A1Speaker unit and electronic device having the sameCHEN HUNG-CHIH·Filed 2012·Application pending·0 cites
- 1440US2012171933A1Pressure controlled polishing platenCHEN HUNG CHIH·Filed 2011·Application pending·0 cites
- 1537US2012021673A1Substrate holder to reduce substrate edge stress during chemical mechanical polishingCHEN HUNG CHIH·Filed 2010·Application pending·0 cites
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