Assignee
CHEN KUEI SHUN
TW·4 granted patents·4 citations·filing 2007–2010
Top patents by PatentIndex Score
4 records- 0182US8158306B2Method and system for combining photomasks to form semiconductor devicesCHEN KUEI SHUN·Filed 2010·Granted Apr 17, 2012·3 cites·13 claims
- 0263US8178289B2System and method for photolithography in semiconductor manufacturingCHEN KUEI SHUN·Filed 2009·Granted May 15, 2012·1 cites·8 claims
- 0345US8132503B2Method and apparatus for planarizing gap-filling materialCHEN KUEI-SHUN·Filed 2007·Granted Mar 13, 2012·0 cites·5 claims
- 0439US8237297B2System and method for providing alignment mark for high-k metal gate processCHEN KUEI SHUN·Filed 2010·Granted Aug 7, 2012·0 cites·20 claims
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