Assignee

CHEN KUN-EI

TW·1 granted patent·1 citations·filing 2012–2012

Technology mixC23C1 H01J1

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1 record

0158US8900886B2System and method of monitoring and controlling atomic layer deposition of tungstenCHEN KUN-EI·Filed 2012·Granted Dec 2, 2014·1 cites·18 claims

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