Assignee
CHU HANYOU
US·3 granted patents·7 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0175US8762100B1Numerical aperture integration for optical critical dimension (OCD) metrologyCHU HANYOU·Filed 2012·Granted Jun 24, 2014·2 cites·20 claims
- 0274US8670948B2Numerical aperture integration for optical critical dimension (OCD) metrologyCHU HANYOU·Filed 2012·Granted Mar 11, 2014·2 cites·21 claims
- 0360US8560270B2Rational approximation and continued-fraction approximation approaches for computation efficiency of diffraction signalsCHU HANYOU·Filed 2008·Granted Oct 15, 2013·3 cites·28 claims
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