Assignee
CHUNG SUNG IL
KR·2 granted patents·11 citations·filing 2008–2010
Top patents by PatentIndex Score
2 records- 0182US9190239B2Plasma immersion ion milling apparatus and methodCHUNG SUNG IL·Filed 2010·Granted Nov 17, 2015·11 cites·10 claims
- 0237US8591711B2Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surfaceCHUNG SUNG IL·Filed 2008·Granted Nov 26, 2013·0 cites·18 claims
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