Assignee
CLAESSENS BERT JAN
BE·3 granted patents·11 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0182US8432529B2Lithographic apparatus and monitoring methodCLAESSENS BERT JAN·Filed 2010·Granted Apr 30, 2013·4 cites·17 claims
- 0278US8508716B2HomogenizerCLAESSENS BERT JAN·Filed 2010·Granted Aug 13, 2013·5 cites·11 claims
- 0368US8885144B2Illumination system and lithographic apparatusCLAESSENS BERT JAN·Filed 2011·Granted Nov 11, 2014·2 cites·20 claims
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