Assignee

CLARIANT INTERNAITONAL LTD

CH·1 granted patent·7 citations·filing 1998–1998

Technology mixC08G1 G03F1

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0136US6080522ARadiation-sensitive resist composition with high heat resistanceCLARIANT INTERNAITONAL LTD·Filed 1998·Granted Jun 27, 2000·7 cites·6 claims

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