Assignee
CLAUSS WILFRIED
DE·4 granted patents·1 pending application·3 citations·filing 2005–2012
Top patents by PatentIndex Score
5 records- 0166US9263161B2Optical arrangement for EUV lithography and method for configuring such an optical arrangementCLAUSS WILFRIED·Filed 2012·Granted Feb 16, 2016·2 cites·18 claims
- 0262US8163667B2Transmitting optical element with low foreign-element contaminationCLAUSS WILFRIED·Filed 2009·Granted Apr 24, 2012·1 cites·30 claims
- 0350US8711332B2Mirror elements for EUV lithography and production methods thereforCLAUSS WILFRIED·Filed 2012·Granted Apr 29, 2014·0 cites·6 claims
- 0444US8570488B2Transmitting optical element and objective for a microlithographic projection exposure apparatusCLAUSS WILFRIED·Filed 2005·Granted Oct 29, 2013·0 cites·35 claims
- 0539US2012212721A1Substrates and mirrors for euv microlithography, and methods for producing themCLAUSS WILFRIED·Filed 2012·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →