Assignee
COLONNA DE LEGA XAVIER M
US·2 granted patents·29 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0192US8649024B2Non-contact surface characterization using modulated illuminationCOLONNA DE LEGA XAVIER M·Filed 2011·Granted Feb 11, 2014·22 cites·38 claims
- 0286US8854628B2Interferometric methods for metrology of surfaces, films and underresolved structuresCOLONNA DE LEGA XAVIER M·Filed 2011·Granted Oct 7, 2014·7 cites·42 claims
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