Assignee
CONSORTIUM FOR SURFACE PROCESS
US·5 granted patents·333 citations·filing 1989–1991
Top patents by PatentIndex Score
5 records- 0194US5057185ATriode plasma reactor with phase modulated plasma controlCONSORTIUM FOR SURFACE PROCESS·Filed 1990·Granted Oct 15, 1991·114 cites·25 claims
- 0290US5111111AMethod and apparatus for coupling a microwave source in an electron cyclotron resonance systemCONSORTIUM FOR SURFACE PROCESS·Filed 1990·Granted May 5, 1992·92 cites·15 claims
- 0384US5267019AMethod and apparatus for reducing fringe interference in laser spectroscopyCONSORTIUM FOR SURFACE PROCESS·Filed 1991·Granted Nov 30, 1993·71 cites·20 claims
- 0472US5302803AApparatus and method for uniform microwave plasma processing using TE1101 modesCONSORTIUM FOR SURFACE PROCESS·Filed 1991·Granted Apr 12, 1994·47 cites·31 claims
- 0544US5130295APassivating thin film for superconducting materialCONSORTIUM FOR SURFACE PROCESS·Filed 1989·Granted Jul 14, 1992·9 cites·1 claims
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