Assignee

CORNELL RESEARCH FOUNDCATTON I

US·1 granted patent·186 citations·filing 1994–1994

Technology mixB81C1 G01P1 Y10S1

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0196US5847454AElectrically isolated released microstructuresCORNELL RESEARCH FOUNDCATTON I·Filed 1994·Granted Dec 8, 1998·186 cites·38 claims

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