Assignee
CRAMER HUGO AUGUSTINUS JOSEPH
NL·6 granted patents·115 citations·filing 2006–2010
Top patents by PatentIndex Score
6 records- 0197US9081303B2Methods and scatterometers, lithographic systems, and lithographic processing cellsCRAMER HUGO AUGUSTINUS JOSEPH·Filed 2010·Granted Jul 14, 2015·73 cites·24 claims
- 0297US8705007B2Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection methodCRAMER HUGO AUGUSTINUS JOSEPH·Filed 2010·Granted Apr 22, 2014·26 cites·27 claims
- 0379US9182682B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodCRAMER HUGO AUGUSTINUS JOSEPH·Filed 2009·Granted Nov 10, 2015·9 cites·13 claims
- 0477US8294907B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodCRAMER HUGO AUGUSTINUS JOSEPH·Filed 2006·Granted Oct 23, 2012·5 cites·12 claims
- 0572US8390823B2Method, inspection apparatus and substrate for determining an approximate structure of an object on a substrateCRAMER HUGO AUGUSTINUS JOSEPH·Filed 2010·Granted Mar 5, 2013·2 cites·13 claims
- 0650US9188875B2Calibration method, inspection method and apparatus, lithographic apparatus, and lithographic processing cellCRAMER HUGO AUGUSTINUS JOSEPH·Filed 2009·Granted Nov 17, 2015·0 cites·26 claims
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