Assignee
CVC INC
US·9 granted patents·916 citations·filing 1996–2000
Top patents by PatentIndex Score
9 records- 0198US6016000AUltra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectricsCVC INC·Filed 1998·Granted Jan 18, 2000·290 cites·35 claims
- 0295US5846883AMethod for multi-zone high-density inductively-coupled plasma generationCVC INC·Filed 1996·Granted Dec 8, 1998·168 cites·27 claims
- 0394US6124198AUltra high-speed chip interconnect using free-space dielectricsCVC INC·Filed 1998·Granted Sep 26, 2000·161 cites·21 claims
- 0487US6167195AMultizone illuminator for rapid thermal processing with improved spatial resolutionCVC INC·Filed 2000·Granted Dec 26, 2000·35 cites·51 claims
- 0583US5876573AHigh magnetic flux cathode apparatus and method for high productivity physical-vapor depositionCVC INC·Filed 1996·Granted Mar 2, 1999·61 cites·34 claims
- 0683US5871588AProgrammable ultraclean electromagnetic substrate rotation apparatus and method for microelectronics manufacturing equipmentCVC INC·Filed 1996·Granted Feb 16, 1999·71 cites·41 claims
- 0782US6221217B1Physical vapor deposition system having reduced thickness backing plateCVC INC·Filed 1998·Granted Apr 24, 2001·55 cites·20 claims
- 0881US6108490AMultizone illuminator for rapid thermal processing with improved spatial resolutionCVC INC·Filed 1998·Granted Aug 22, 2000·52 cites·48 claims
- 0961US6106148AApparatus including integral actuator with control for automated calibration of temperature sensors in rapid thermal processing equipmentCVC INC·Filed 1999·Granted Aug 22, 2000·23 cites·50 claims
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