Assignee
CVC PRODUCTS INC
US·48 granted patents·3,869 citations·filing 1992–2002
Top patents by PatentIndex Score
48 records- 0198US6692575B1Apparatus for supporting a substrate in a reaction chamberCVC PRODUCTS INC·Filed 2000·Granted Feb 17, 2004·565 cites·22 claims
- 0298US6136165AApparatus for inductively-coupled-plasma-enhanced ionized physical-vapor depositionCVC PRODUCTS INC·Filed 1997·Granted Oct 24, 2000·169 cites·32 claims
- 0397US6365502B1Microelectronic interconnect material with adhesion promotion layer and fabrication methodCVC PRODUCTS INC·Filed 2000·Granted Apr 2, 2002·153 cites·17 claims
- 0497US6203620B1Hermetically-sealed inductively-coupled plasma source structure and method of useCVC PRODUCTS INC·Filed 2000·Granted Mar 20, 2001·90 cites·22 claims
- 0597US6132805AShutter for thin-film processing equipmentCVC PRODUCTS INC·Filed 1998·Granted Oct 17, 2000·133 cites·57 claims
- 0697US5937142AMulti-zone illuminator for rapid thermal processingCVC PRODUCTS INC·Filed 1996·Granted Aug 10, 1999·471 cites·17 claims
- 0796US6444263B1Method of chemical-vapor deposition of a materialCVC PRODUCTS INC·Filed 2000·Granted Sep 3, 2002·108 cites·20 claims
- 0895US6508197B1Apparatus for dispensing gas for fabricating substratesCVC PRODUCTS INC·Filed 2000·Granted Jan 21, 2003·70 cites·23 claims
- 0995US6294836B1Semiconductor chip interconnect barrier material and fabrication methodCVC PRODUCTS INC·Filed 1998·Granted Sep 25, 2001·131 cites·14 claims
- 1095US6190732B1Method and system for dispensing process gas for fabricating a device on a substrateCVC PRODUCTS INC·Filed 1998·Granted Feb 20, 2001·126 cites·24 claims
- 1195US6051113AApparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexingCVC PRODUCTS INC·Filed 1998·Granted Apr 18, 2000·141 cites·75 claims
- 1295US5976261AMulti-zone gas injection apparatus and method for microelectronics manufacturing equipmentCVC PRODUCTS INC·Filed 1996·Granted Nov 2, 1999·155 cites·42 claims
- 1392US6812126B1Method for fabricating a semiconductor chip interconnectCVC PRODUCTS INC·Filed 2000·Granted Nov 2, 2004·48 cites·19 claims
- 1492US6753272B1High-performance energy transfer method for thermal processing applicationsCVC PRODUCTS INC·Filed 2000·Granted Jun 22, 2004·58 cites·28 claims
- 1592US6596133B1Method and system for physically-assisted chemical-vapor depositionCVC PRODUCTS INC·Filed 2001·Granted Jul 22, 2003·46 cites·32 claims
- 1692US6544341B1System for fabricating a device on a substrate with a process gasCVC PRODUCTS INC·Filed 2000·Granted Apr 8, 2003·41 cites·24 claims
- 1792US6508885B1Edge sealing structure for substrate in low-pressure processing environmentCVC PRODUCTS INC·Filed 2000·Granted Jan 21, 2003·41 cites·21 claims
- 1892US6274495B1Method for fabricating a device on a substrateCVC PRODUCTS INC·Filed 2000·Granted Aug 14, 2001·40 cites·23 claims
- 1991US6645847B2Microelectronic interconnect material with adhesion promotion layer and fabrication methodCVC PRODUCTS INC·Filed 2002·Granted Nov 11, 2003·47 cites·22 claims
- 2091US6627995B2Microelectronic interconnect material with adhesion promotion layer and fabrication methodCVC PRODUCTS INC·Filed 2002·Granted Sep 30, 2003·59 cites·25 claims
- 2190US6905578B1Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structureCVC PRODUCTS INC·Filed 1998·Granted Jun 14, 2005·102 cites·95 claims
- 2290US6705394B1Rapid cycle chuck for low-pressure processingCVC PRODUCTS INC·Filed 2000·Granted Mar 16, 2004·57 cites·63 claims
- 2389US5715361ARapid thermal processing high-performance multizone illuminator for wafer backside heatingCVC PRODUCTS INC·Filed 1995·Granted Feb 3, 1998·80 cites·19 claims
- 2489US5630916AMagnetic orienting device for thin film deposition and method of useCVC PRODUCTS INC·Filed 1995·Granted May 20, 1997·48 cites·11 claims
- 2588US6197166B1Method for inductively-coupled-plasma-enhanced ionized physical-vapor depositionCVC PRODUCTS INC·Filed 1999·Granted Mar 6, 2001·45 cites·8 claims
- 2688US5775416ATemperature controlled chuck for vacuum processingCVC PRODUCTS INC·Filed 1995·Granted Jul 7, 1998·84 cites·12 claims
- 2786US6378600B1Thermally conductive chuck with thermally separated sealing structuresCVC PRODUCTS INC·Filed 2000·Granted Apr 30, 2002·32 cites·20 claims
- 2885US5248402AApple-shaped magnetron for sputtering systemCVC PRODUCTS INC·Filed 1992·Granted Sep 28, 1993·46 cites·25 claims
- 2981US6204204B1Method and apparatus for depositing tantalum-based thin films with organmetallic precursorCVC PRODUCTS INC·Filed 1999·Granted Mar 20, 2001·60 cites·43 claims
- 3081US6188044B1High-performance energy transfer system and method for thermal processing applicationsCVC PRODUCTS INC·Filed 1998·Granted Feb 13, 2001·54 cites·61 claims
- 3180US6461675B2Method for forming a copper film on a substrateCVC PRODUCTS INC·Filed 1998·Granted Oct 8, 2002·65 cites·71 claims
- 3280US6245655B1Method for planarized deposition of a materialCVC PRODUCTS INC·Filed 1999·Granted Jun 12, 2001·56 cites·25 claims
- 3380US6073576ASubstrate edge seal and clamp for low-pressure processing equipmentCVC PRODUCTS INC·Filed 1997·Granted Jun 13, 2000·51 cites·70 claims
- 3480US6048162AWafer handler for multi-station toolCVC PRODUCTS INC·Filed 1998·Granted Apr 11, 2000·56 cites·36 claims
- 3580US6039848AUltra-high vacuum apparatus and method for high productivity physical vapor deposition.CVC PRODUCTS INC·Filed 1997·Granted Mar 21, 2000·52 cites·33 claims
- 3679US5746897AHigh magnetic flux permanent magnet array apparatus and method for high productivity physical vapor depositionCVC PRODUCTS INC·Filed 1996·Granted May 5, 1998·39 cites·23 claims
- 3777US6444103B1Method and apparatus for thin film deposition using an active shutterCVC PRODUCTS INC·Filed 2000·Granted Sep 3, 2002·15 cites·15 claims
- 3877US6004029AMethod for automated calibration of temperature sensors in rapid thermal processing equipmentCVC PRODUCTS INC·Filed 1996·Granted Dec 21, 1999·44 cites·10 claims
- 3977US5936829AThermally conductive chuck for vacuum processorCVC PRODUCTS INC·Filed 1997·Granted Aug 10, 1999·50 cites·27 claims
- 4073US6042707AMultiple-coil electromagnet for magnetically orienting thin filmsCVC PRODUCTS INC·Filed 1998·Granted Mar 28, 2000·22 cites·51 claims
- 4169US6138745ATwo-stage sealing system for thermally conductive chuckCVC PRODUCTS INC·Filed 1997·Granted Oct 31, 2000·32 cites·7 claims
- 4266US5950723AMethod of regulating substrate temperature in a low pressure environmentCVC PRODUCTS INC·Filed 1997·Granted Sep 14, 1999·28 cites·7 claims
- 4365US6373364B1Electromagnet for thin-film processing with winding pattern for reducing skewCVC PRODUCTS INC·Filed 2000·Granted Apr 16, 2002·10 cites·29 claims
- 4465US6126790AMethod of magnetically orienting thin magnetic films with a multiple-coil electromagnetCVC PRODUCTS INC·Filed 2000·Granted Oct 3, 2000·8 cites·15 claims
- 4558US6106682AThin-film processing electromagnet for low-skew magnetic orientationCVC PRODUCTS INC·Filed 1998·Granted Aug 22, 2000·18 cites·17 claims
- 4655US5902466ASputtering apparatus with magnetic orienting device for thin film depositionCVC PRODUCTS INC·Filed 1997·Granted May 11, 1999·9 cites·15 claims
- 4754US6235164B1Low-pressure processing system for magnetic orientation of thin magnetic filmCVC PRODUCTS INC·Filed 1999·Granted May 22, 2001·13 cites·52 claims
- 4853US6475359B1Thin-film processing electromagnet with modified core for producing low-skew magnetic orientationCVC PRODUCTS INC·Filed 2000·Granted Nov 5, 2002·1 cites·35 claims
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