Assignee
CYBEQ SYST INC
US·5 granted patents·799 citations·filing 1990–1995
Top patents by PatentIndex Score
5 records- 0196US5205082AWafer polisher head having floating retainer ringCYBEQ SYST INC·Filed 1991·Granted Apr 27, 1993·357 cites·21 claims
- 0293US5443416ARotary union for coupling fluids in a wafer polishing apparatusCYBEQ SYST INC·Filed 1993·Granted Aug 22, 1995·148 cites·15 claims
- 0389US5527209AWafer polisher head adapted for easy removal of wafersCYBEQ SYST INC·Filed 1995·Granted Jun 18, 1996·109 cites·26 claims
- 0482US5135349ARobotic handling systemCYBEQ SYST INC·Filed 1990·Granted Aug 4, 1992·94 cites·4 claims
- 0581US5238354ASemiconductor object pre-aligning apparatusCYBEQ SYST INC·Filed 1992·Granted Aug 24, 1993·91 cites·15 claims
Join the waitlist — get patent alerts
Get an alert when CYBEQ SYST INC files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →