Assignee
CYBEROPTICS SEMICONDUCTOR INC
US·8 granted patents·2 pending applications·121 citations·filing 2002–2010
Top patents by PatentIndex Score
10 records- 0194US7283255B2Wireless substrate-like sensorCYBEROPTICS SEMICONDUCTOR INC·Filed 2006·Granted Oct 16, 2007·40 cites·20 claims
- 0290US7456977B2Wireless substrate-like sensorCYBEROPTICS SEMICONDUCTOR INC·Filed 2006·Granted Nov 25, 2008·19 cites·20 claims
- 0382US7289230B2Wireless substrate-like sensorCYBEROPTICS SEMICONDUCTOR INC·Filed 2003·Granted Oct 30, 2007·25 cites·17 claims
- 0481US7778793B2Wireless sensor for semiconductor processing systemsCYBEROPTICS SEMICONDUCTOR INC·Filed 2008·Granted Aug 17, 2010·17 cites·18 claims
- 0568US7893697B2Capacitive distance sensing in semiconductor processing toolsCYBEROPTICS SEMICONDUCTOR INC·Filed 2008·Granted Feb 22, 2011·3 cites·11 claims
- 0666US7891981B1System for maintaining a printed circuit board in an enclosureCYBEROPTICS SEMICONDUCTOR INC·Filed 2007·Granted Feb 22, 2011·4 cites·12 claims
- 0754US6897463B1Wafer carrier mapping sensor assemblyCYBEROPTICS SEMICONDUCTOR INC·Filed 2002·Granted May 24, 2005·9 cites·18 claims
- 0852US7095763B2Semiconductor wafer carrier mapping sensorCYBEROPTICS SEMICONDUCTOR INC·Filed 2002·Granted Aug 22, 2006·4 cites·14 claims
- 0936US2010201984A1In-line high pressure particle sensing systemCYBEROPTICS SEMICONDUCTOR INC·Filed 2010·Application pending·0 cites
- 1035US2005086024A1Semiconductor wafer location sensing via non contact methodsCYBEROPTICS SEMICONDUCTOR INC·Filed 2004·Application pending·0 cites
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